TESCOM™ 64-3200 SERIES BSGS PRESSURE REGULATOR

64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra microinch / 0.25 micrometer surface finish and is available in Hastelloy® trim. Maximum flow rates are up to 31.8 SCFM / 900 SLPM, with inlet pressures of 150, 1000, 1500 psig / 10.3, 69.0, 103 bar and outlet pressures up to 200 psig / 13.8 bar. Ideal for use in Bulk Specialty Gas Systems (BSGS), 1/2″ point-of-use, tool hook-ups and gas cabinets.

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TESCOM 64-3200 Series

Specifications

Maximum Inlet Pressure 150, 1000, 1500 psig / 10.3, 69.0, 103 bar
Outlet Pressure Ranges 30, 60, 100, 150, 200 psig / 2.1, 4.1, 6.9, 10.3, 13.8 bar
Design Proof Pressure 150% of maximum rated
Inboard Leak Rate <1 x 10-9 atm cc/sec He
Operating Temperature Teflon® Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Vespel® Seat: -40°F to 350°F / -40°C to 177°C
Flow Capacity Cv = 1.2
Body 316L Stainless Steel Electropolish or
316L VAR Stainless Steel Electropolish
Diaphragm Nickel Alloy (Hastelloy®)
Seat Retainer 316 Stainless Steel
Poppet 316 Stainless Steel or Nickel Alloy (Hastelloy®)
Valve Seat PTFE, Polyimide (Vespel®), PCTFE
Valve Spring 316 Stainless Steel
Remaining Parts 316 Stainless Steel
Internal Surface Finish 10 Ra microinch / 0.25 micrometer
Connections Welded female or male VCR®
Tube stubs
High Purity Internal Connections (H.P.I.C.)
(Internal style of VCR®, compatible with male swivel VCR®)
Cleaning DI water electronic grade cleaned and ES 500 Particle Certified
for internal electropolish models
Internal Volume 1/2″ fitting / 32 cc
Weight (without gauges) 3.5 lbs / 1.6 kg

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