TESCOM™ 64-3400 SERIES DUAL STAGE REGULATOR

64-3400 Series dual-stage, ultra high purity pressure reducing regulator offers a tied diaphragm design and 10 Ra microinch / 0.25 micrometer surface finish with optional Hastelloy® trim. Inlet pressure is 3500 psig / 241 bar with outlet pressures up to 150 psig / 10.3 bar. Ideal for use in gas cabinets, semiconductor manufacturing and research labs.

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TESCOM 64-3400 Series

Specifications

Maximum Inlet Pressure 3500 psig / 241 bar
Outlet Pressure Ranges 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar
Design Proof Pressure 150% of maximum rated
Inboard Leak Rate Seat: < 4 x 10-9 atm cc/sec He
Diaphragm: < 1 x 10-9 atm cc/sec He
Operating Temperature PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Teflon PFA® Seat: -40°F to 160°F / -40°C to 71°C
Flow Capacity See Part Number Selector
Body 316L Stainless Steel Electropolish or 316L VAR Stainless
Steel Electropolish
Diaphragm 316L Stainless Steel
Valve Seat PCTFE or PTFE PFA®
Valve Spring 316 Stainless Steel
Valve Stem and Remaining Parts 316 Stainless Steel (Nickel Alloy (Hastelloy®) optional)
Internal Surface Finish 10 Ra microinch / 0.25 micrometer
Connections Welded female or male VCR®
Tube stubs
High Purity Internal Connections (H.P.I.C.)
(Internal style of VCR®, compatible with male swivel VCR®)
Cleaning DI water electronic grade cleaned and ES 500 Particle Certified
for internal electropolish models
Internal Volume 10 cc
Weight 3.0 lbs / 1.4 kg

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