TESCOM™ 64-3600 SERIES HIGHLY SENSITIVE PRESSURE REGULATOR

64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4″ point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.

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TESCOM 64-3600 Series

Specifications

Maximum Inlet Pressure 600 or 3500 psig / 41.4 or 241 bar
Outlet Pressure Ranges 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar
Design Proof Pressure 150% of maximum rated
Inboard Leak Rate 1 x 10-9 atm cc/sec He
Operating Temperature PCTFE Seat: -40°F to 140°F / -40°C to 60°C
flon® Seat: -40°F to 160°F / -40°C to 71°C
Vespel® Seat: -40°F to 350°F / -40°C to 177°C
Flow Capacity Cv = 0.15 or 0.06
Body 316L Stainless Steel Electropolish or 316L VAR Stainless
Steel Electropolish
Diaphragm Nickel Alloy (Hastelloy®)
Valve Seat PCTFE, PTFE or Polyimide (Vespel®)
Stem and Valve Spring 316 Stainless Steel
Remaining Parts 316 Stainless Steel or Nickel Alloy (Hastelloy®)
Internal Surface Finish 10 Ra microinch / 0.25 micrometer
Connections Welded female or male VCR®
Tube stubs
High Purity Internal Connections (H.P.I.C.)
Internal style of VCR®, compatible with male swivel VCR®
Cleaning DI water electronic grade cleaned and ES500 Particle Certified
for internal electropolish models
Internal Volume 12 cc
Weight 2 lbs / 0.9 kg

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