TESCOM™ 64-5000 SERIES SUBATMOSPHERIC PRESSURE REGULATOR

64-5000 Series ultra high purity, absolute / subatmospheric pressure reducing regulator offers a 10 Ra surface finish. Inlet pressures are 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar with outlet pressures ranges from 50 mm Hg absolute – 15 to 100 psig / 50 mm Hg absolute – 1.0 to 6.9 bar. Ideal for use in vacuum pressures control, toxic gas analysis, valve manifold boxes, gas cabinets and semiconductor manufacturing.

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TESCOM 64-5000 Series

Specifications

Maximum Inlet Pressure 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar
Outlet Pressure Ranges 50 mm Hg absolute – 15 psig / 1.0 bar
50 mm Hg absolute – 30 psig / 2.1 bar
50 mm Hg absolute – 60 psig / 4.1 bar
50 mm Hg absolute – 100 psig / 6.9 bar
Design Proof Pressure 150% of maximum rated
Inboard Leak Rate <1 x 10-9 atm cc/sec He
Operating Temperature PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Teflon® Seat: -40°F to 160°F / -40°C to 71°C
Flow Capacity Cv = 0.24 (120 psig / 8.3 bar model)
Cv = 0.15 (600 psig / 41.4 bar model)
Cv = 0.06 (3500 psig / 241 bar model)
Body 316L Stainless Steel Electropolish or
316L VAR Stainless Steel Electropolish
Valve Seat PTFE or PCTFE
Diaphragm 316L Stainless Steel
Valve Stem, Spring, and Valve Guide 316 Stainless Steel
Internal Surface Finish 10 Ra microinch / 0.25 micrometer
Connections Welded female or male VCR®
Tube stubs
High Purity Internal Connections (H.P.I.C.)
(Internal style of VCR®, compatible with male swivel VCR®)
Cleaning DI water electronic grade cleaned and ES 500 Particle Certified
f or internal electropolish models
Internal Volume 2.9 cc
Weight 2.0 lbs / 0.9 kg

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